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Depassivation of latent plasma damage in nMOSFETs

dc.contributor.authorCellere, G.
dc.contributor.authorPantisano, Luigi
dc.contributor.authorValentini, M. G.
dc.contributor.authorPaccagnella, A.
dc.date.accessioned2021-10-14T16:40:55Z
dc.date.available2021-10-14T16:40:55Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5129
dc.sourceIIOimport
dc.titleDepassivation of latent plasma damage in nMOSFETs
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage144
dc.source.endpage149
dc.source.journalIEEE Trans. on Device and Materials Reliability
dc.source.issue3
dc.source.volume1
imec.availabilityPublished - imec


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