Publication:

Depassivation of latent plasma damage in nMOSFETs

Date

2001

Journal article

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Author(s)

;

Pantisano, Luigi

;

Valentini, M. G.

;

Paccagnella, A.

Journal

IEEE Trans. on Device and Materials Reliability

Metrics

1906 since deposited on 2021-10-14

Acq. date: 2025-12-10