Depassivation of latent plasma damage in nMOSFETs

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Authors

Cellere, G.; Pantisano, Luigi; Valentini, M. G.; Paccagnella, A.

Issue

3

Journal

IEEE Trans. on Device and Materials Reliability

Volume

1

Title

Depassivation of latent plasma damage in nMOSFETs

Publication type

Journal article

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