Publication:
Depassivation of latent plasma damage in nMOSFETs
Date
| dc.contributor.author | Cellere, G. | |
| dc.contributor.author | Pantisano, Luigi | |
| dc.contributor.author | Valentini, M. G. | |
| dc.contributor.author | Paccagnella, A. | |
| dc.date.accessioned | 2021-10-14T16:40:55Z | |
| dc.date.available | 2021-10-14T16:40:55Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5129 | |
| dc.source.beginpage | 144 | |
| dc.source.endpage | 149 | |
| dc.source.issue | 3 | |
| dc.source.journal | IEEE Trans. on Device and Materials Reliability | |
| dc.source.volume | 1 | |
| dc.title | Depassivation of latent plasma damage in nMOSFETs | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |