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Technology roadmap challenges for deep submicron CMOS

dc.contributor.authorClaeys, Cor
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-10-14T16:42:04Z
dc.date.available2021-10-14T16:42:04Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5146
dc.sourceIIOimport
dc.titleTechnology roadmap challenges for deep submicron CMOS
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage91
dc.source.endpage102
dc.source.conferenceMicroelectronics, Microsystems and Nanotechnology; Proceedings MMN
dc.source.conferencedate20/11/2000
dc.source.conferencelocationAthens Greece
imec.availabilityPublished - imec


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