Raised source/drains with disposable spacers for sub 100nm CMOS technologies
dc.contributor.author | De Meyer, Kristin | |
dc.contributor.author | Kubicek, Stefan | |
dc.contributor.author | van Meer, Hans | |
dc.date.accessioned | 2021-10-14T16:46:18Z | |
dc.date.available | 2021-10-14T16:46:18Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5198 | |
dc.source | IIOimport | |
dc.title | Raised source/drains with disposable spacers for sub 100nm CMOS technologies | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.contributor.imecauthor | Kubicek, Stefan | |
dc.source.peerreview | no | |
dc.source.beginpage | 87 | |
dc.source.endpage | 90 | |
dc.source.conference | Extended Abstracts of International Workshop on Junction Technology | |
dc.source.conferencedate | 29/11/2001 | |
dc.source.conferencelocation | Tokyo Japan | |
imec.availability | Published - imec |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |