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Process development of fast and sensitive polySiGe microbolometer arrays

dc.contributor.authorDe Moor, Piet
dc.contributor.authorKavadias, Spyros
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-14T16:46:23Z
dc.date.available2021-10-14T16:46:23Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5199
dc.sourceIIOimport
dc.titleProcess development of fast and sensitive polySiGe microbolometer arrays
dc.typeProceedings paper
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.source.peerreviewno
dc.source.beginpage94
dc.source.endpage99
dc.source.conferencePhotodetectors: Materials and Devices VI;
dc.source.conferencelocation
imec.availabilityPublished - imec


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