dc.contributor.author | De Moor, Piet | |
dc.contributor.author | Kavadias, Spyros | |
dc.contributor.author | Leonov, Vladimir | |
dc.contributor.author | Van Hoof, Chris | |
dc.date.accessioned | 2021-10-14T16:46:23Z | |
dc.date.available | 2021-10-14T16:46:23Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5199 | |
dc.source | IIOimport | |
dc.title | Process development of fast and sensitive polySiGe microbolometer arrays | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | De Moor, Piet | |
dc.contributor.imecauthor | Leonov, Vladimir | |
dc.contributor.imecauthor | Van Hoof, Chris | |
dc.contributor.orcidimec | Leonov, Vladimir::0000-0002-4364-8945 | |
dc.source.peerreview | no | |
dc.source.beginpage | 94 | |
dc.source.endpage | 99 | |
dc.source.conference | Photodetectors: Materials and Devices VI; | |
dc.source.conferencelocation | | |
imec.availability | Published - imec | |