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The increasing importance of the use of ozone in micro-electronics industry

dc.contributor.authorDe Smedt, Frank
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorClaes, M.
dc.contributor.authorHeyns, Marc
dc.contributor.authorVankerckhoven, Hans
dc.contributor.authorVinckier, Chris
dc.date.accessioned2021-10-14T16:46:45Z
dc.date.available2021-10-14T16:46:45Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5203
dc.sourceIIOimport
dc.titleThe increasing importance of the use of ozone in micro-electronics industry
dc.typeOral presentation
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conference15th World Congress of the International Ozone Association; 10-15 September 2001; London, UK.
dc.source.conferencelocation
imec.availabilityPublished - imec


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