dc.contributor.author | De Smedt, Frank | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Heyns, Marc | |
dc.contributor.author | Vinckier, Chris | |
dc.date.accessioned | 2021-10-14T16:46:56Z | |
dc.date.available | 2021-10-14T16:46:56Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5205 | |
dc.source | IIOimport | |
dc.title | Materials compatibility and organic build-up during ozone-based cleanings of semiconductor devices | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 63 | |
dc.source.endpage | 66 | |
dc.source.conference | Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS | |
dc.source.conferencedate | 18/09/2000 | |
dc.source.conferencelocation | Oostende Belgium | |
imec.availability | Published - open access | |
imec.internalnotes | Solid State Phenomena. Part B; Vol. 76-77 | |