Publication:

TOF-SIMS artifact in the analysis of ZrO2/SiO2/Si stacks

Date

2001
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Author(s)

De Witte, Hilde
;
Conard, Thierry  
;
Vandervorst, Wilfried  
;
Gijbels, Renaat

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1966 since deposited on 2021-10-14
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Acq. date: 2026-05-19

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