Authors

Detavernier, C.; Ruttens, Gerlinde; Van Meirhaeghe, R.; Maex, Karen

Conference

Symposium K of the MRS Spring Meeting: Gate Stack and Silicide Issues in Si Processing II; 16-20 April 2001; San Francisco, CA,

Title

The influence of TiN on the thermal stability of CoSi2

Publication type

Oral presentation