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Controlling CoSi2 nucleation: the effect of entropy of mixing

dc.contributor.authorDetavernier, C.
dc.contributor.authorVan Meirhaeghe, R. L.
dc.contributor.authorMaex, Karen
dc.contributor.authorCardon, F.
dc.date.accessioned2021-10-14T16:51:11Z
dc.date.available2021-10-14T16:51:11Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5250
dc.sourceIIOimport
dc.titleControlling CoSi2 nucleation: the effect of entropy of mixing
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpageC7.9.1
dc.source.endpageC7.9.6
dc.source.conferenceGate Stack and Silicide Issues in Silicon Processing
dc.source.conferencedate24/04/2000
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMaterials Research Society Symposium Proceedings; Vol. 611


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