Silicide engineering: influence of alloying elements on CoSi2 nucleation

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Authors
Detavernier, C.; Van Meirhaeghe, R. L.; Maex, Karen; Cardon, F.
Conference
Gate stack and silicide issues in silicon processing; MRS Spring Meeting 2000 Symposium
Title
Silicide engineering: influence of alloying elements on CoSi2 nucleation
Publication type
Proceedings paper
Embargo date
9999-12-31
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