Publication:

On the use of indium and gallium as p-type dopants in Si 0.1 μm MOSFETs

Date

1995

Proceedings Paper

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Files

497.pdf 214.59 KB

Author(s)

Biesemans, Serge

;

Kubicek, Stefan

;

Van Laer, Joris

;

;

;

;

De Meyer, Kristin

Statistics

1989 since deposited on 2021-09-29

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Acq. date: 2026-09-08