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Narrow trench corrosion

dc.contributor.authorErnur, Didem
dc.contributor.authorKondo, Seiichi
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T16:54:32Z
dc.date.available2021-10-14T16:54:32Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5280
dc.sourceIIOimport
dc.titleNarrow trench corrosion
dc.typeOral presentation
dc.contributor.imecauthorErnur, Didem
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference; 9-11 October 2001; Montreal, Canada.
dc.source.conferencelocation
imec.availabilityPublished - imec


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