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Deposition of SBT and PZT thin films for FERAM application

dc.contributor.authorEveraerts, Jurgen
dc.contributor.authorJohnson, Jo
dc.contributor.authorBartic, Andrei
dc.contributor.authorKaczer, Ben
dc.contributor.authorLisoni, Judit
dc.contributor.authorVander Meeren, Hans
dc.contributor.authorWouters, D.
dc.date.accessioned2021-10-14T16:54:58Z
dc.date.available2021-10-14T16:54:58Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5284
dc.sourceIIOimport
dc.titleDeposition of SBT and PZT thin films for FERAM application
dc.typeOral presentation
dc.contributor.imecauthorKaczer, Ben
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.source.peerreviewno
dc.source.conferenceWorkshop: Journées des Couches Ferroelectrectriques - JCF; 26-27 November 2001; Maubeuge, France.
dc.source.conferencelocation
imec.availabilityPublished - imec


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