Authors

Eyben, Pierre; Duhayon, Natasja; Clarysse, Trudo; Vandervorst, Wilfried

Conference

6th Int. Workshop on Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors - USJ

Title

Bias-induced junction displacements in SSRM and SCM

Publication type

Meeting abstract

Embargo date

9999-12-31