SSRM & SCM observation of enhanced lateral AS- and BF2-diffusion induced by nitride spacers

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Authors
Eyben, Pierre; Duhayon, Natasja; Stuer, Cindy; De Wolf, Ingrid; Rooyackers, Rita; Clarysse, Trudo; Vandervorst, Wilfried; Badenes, Gonçal
Conference
Si Front-End Processing - Physics and Technology of Dopant-Defect Interactions II
Title
SSRM & SCM observation of enhanced lateral AS- and BF2-diffusion induced by nitride spacers
Publication type
Proceedings paper
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