dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Xu, Mingwei | |
dc.contributor.author | Duhayon, Natasja | |
dc.contributor.author | Clarysse, Trudo | |
dc.contributor.author | Callewaert, Sven | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-14T16:55:28Z | |
dc.date.available | 2021-10-14T16:55:28Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5288 | |
dc.source | IIOimport | |
dc.title | Scanning spreading resistance microscopy and spectroscopy for routine and quantitative 2D-carrier profiling | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Duhayon, Natasja | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 182 | |
dc.source.endpage | 191 | |
dc.source.conference | 6th Int. Workshop on Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors - USJ | |
dc.source.conferencedate | 22/04/2001 | |
dc.source.conferencelocation | Napa, CA USA | |
imec.availability | Published - open access | |