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In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates

dc.contributor.authorGhica, C.
dc.contributor.authorNistor, Leona
dc.contributor.authorBender, Hugo
dc.contributor.authorSteegen, An
dc.contributor.authorLauwers, A.
dc.contributor.authorMaex, Karen
dc.contributor.authorVan Landuyt, J.
dc.date.accessioned2021-10-14T16:58:32Z
dc.date.available2021-10-14T16:58:32Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5315
dc.sourceIIOimport
dc.titleIn situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage701
dc.source.endpage708
dc.source.journalJournal of Materials Research
dc.source.issue3
dc.source.volume16
imec.availabilityPublished - imec


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