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In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates
Publication:
In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates
Date
2001
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ghica, C.
;
Nistor, Leona
;
Bender, Hugo
;
Steegen, An
;
Lauwers, A.
;
Maex, Karen
;
Van Landuyt, J.
Journal
Journal of Materials Research
Abstract
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1949
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1949
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations