In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates

Author(s)

Ghica, C.

;

Nistor, Leona

;

;

Steegen, An

;

Lauwers, A.

;

;

Van Landuyt, J.

Journal of Materials Research

1951 since deposited on 2021-10-14

1last month

Acq. date: 2025-12-08