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Processing factors influencing the leakage current in shallow junction diodes for deep submicro-meter CMOS
Publication:
Processing factors influencing the leakage current in shallow junction diodes for deep submicro-meter CMOS
Date
2001
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Grau, Lluis
;
Augendre, Emmanuel
;
Simoen, Eddy
;
Rooyackers, Rita
;
Claeys, C.
;
Badenes, Gonçal
;
Romano-Rodriguez, A.
Journal
Journal of Materials Science: Materials in Electronics
Abstract
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1984
since deposited on 2021-10-14
Acq. date: 2025-12-09
Citations
Metrics
Views
1984
since deposited on 2021-10-14
Acq. date: 2025-12-09
Citations