EFTEM study of plasma etched low-k Si-O-C dielectrics

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Authors
Hens, S.; Bender, Hugo; Donaton, R. A.; Maex, Karen; Vanhaelemeersch, Serge; Van Landuyt, J.
Conference
Microscopy of Semiconducting Materials - MSMXII
Title
EFTEM study of plasma etched low-k Si-O-C dielectrics
Publication type
Proceedings paper
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