Alternative gate insulator materials for future generation MOSFETs

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Authors
Heyns, Marc; Bender, Hugo; Carter, Richard; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; Degraeve, Robin; De Witte, Hilde; Groeseneken, Guido; Haukka, S.; Henson, Kirklen; Houssa, Michel; Kubicek, Stefan; Maes, Jos; Naili, Mohamed; Nohira, Hiroshi; Tsai, Wilman; Tuominen, Marko; Vandervorst, R.; Wilhelm, Rudi; Young, Edward; Zhao, Chao
Conference
International Forum on Semiconductor Technology - IFST; 7-8 March 2001; Antwerpen, Belgium.
Title
Alternative gate insulator materials for future generation MOSFETs
Publication type
Oral presentation
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