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High k dielectric materials prepared by atomic layer CVD

dc.contributor.authorHeyns, Marc
dc.contributor.authorBender, Hugo
dc.contributor.authorCarter, Richard
dc.contributor.authorCaymax, Matty
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDegraeve, Robin
dc.contributor.authorDe Witte, Hilde
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHaukka, S.
dc.contributor.authorHenson, Kirklen
dc.contributor.authorHoussa, Michel
dc.contributor.authorKubicek, Stefan
dc.contributor.authorMaes, Guido
dc.contributor.authorNaili, Mohamed
dc.contributor.authorNohira, Hiroshi
dc.contributor.authorTsai, Wilman
dc.contributor.authorTuominen, Marko
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorWilhelm, Rudi
dc.contributor.authorYang, E.
dc.contributor.authorZhao, Chao
dc.date.accessioned2021-10-14T17:02:01Z
dc.date.available2021-10-14T17:02:01Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5342
dc.sourceIIOimport
dc.titleHigh k dielectric materials prepared by atomic layer CVD
dc.typeOral presentation
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.source.peerreviewno
dc.source.conference12th INFOS Conference - Insulating Films on Semiconductors; June 2001; Udine, Italy.
dc.source.conferencelocation
imec.availabilityPublished - imec


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