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Defect generation in Si/Sio2/Zro2/Tin structures: the possible role of hydrogen

dc.contributor.authorHoussa, Michel
dc.contributor.authorAfanas'ev, V. V.
dc.contributor.authorStesmans, Andre
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T17:02:39Z
dc.date.available2021-10-14T17:02:39Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5347
dc.sourceIIOimport
dc.titleDefect generation in Si/Sio2/Zro2/Tin structures: the possible role of hydrogen
dc.typeJournal article
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorStesmans, Andre
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.source.peerreviewno
dc.source.beginpageL93
dc.source.endpageL96
dc.source.journalSemiconductor Science and Technology
dc.source.issue12
dc.source.volume16
imec.availabilityPublished - imec


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