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Defect generation in Si/Sio2/Zro2/Tin structures: the possible role of hydrogen
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Authors
Houssa, Michel
;
Afanas'ev, V. V.
;
Stesmans, Andre
;
Heyns, Marc
Issue
12
Journal
Semiconductor Science and Technology
Volume
16
Title
Defect generation in Si/Sio2/Zro2/Tin structures: the possible role of hydrogen
Publication type
Journal article
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