Defect generation in Si/Sio2/Zro2/Tin structures: the possible role of hydrogen

dc.contributor.author	Houssa, Michel
dc.contributor.author	Afanas'ev, V. V.
dc.contributor.author	Stesmans, Andre
dc.contributor.author	Heyns, Marc
dc.contributor.imecauthor	Houssa, Michel
dc.contributor.imecauthor	Stesmans, Andre
dc.contributor.imecauthor	Heyns, Marc
dc.contributor.orcidimec	Houssa, Michel::0000-0003-1844-3515
dc.date.accessioned	2021-10-14T17:02:39Z
dc.date.available	2021-10-14T17:02:39Z
dc.date.issued	2001
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/5347
dc.source.beginpage	L93
dc.source.endpage	L96
dc.source.issue	12
dc.source.journal	Semiconductor Science and Technology
dc.source.volume	16
dc.title	Defect generation in Si/Sio2/Zro2/Tin structures: the possible role of hydrogen
dc.type	Journal article
dspace.entity.type	Publication
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