dc.contributor.author | Houssa, Michel | |
dc.contributor.author | Afanas'ev, V. V. | |
dc.contributor.author | Stesmans, Andre | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-10-14T17:02:47Z | |
dc.date.available | 2021-10-14T17:02:47Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5348 | |
dc.source | IIOimport | |
dc.title | Defect generation in ultra-thin SiO2 gate layers and SiO2/ZrO2 gate stacks and the dispersive transport model | |
dc.type | Journal article | |
dc.contributor.imecauthor | Houssa, Michel | |
dc.contributor.imecauthor | Stesmans, Andre | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Houssa, Michel::0000-0003-1844-3515 | |
dc.source.peerreview | no | |
dc.source.beginpage | 367 | |
dc.source.endpage | 372 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 1_4 | |
dc.source.volume | 59 | |
imec.availability | Published - imec | |
imec.internalnotes | 12th INFOS Conference - Insulating Films on Semiconductors; June 2001; Udine, Italy | |