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Defect generation in ultra-thin SiO2 gate layers and SiO2/ZrO2 gate stacks and the dispersive transport model
Publication:
Defect generation in ultra-thin SiO2 gate layers and SiO2/ZrO2 gate stacks and the dispersive transport model
Date
2001
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Houssa, Michel
;
Afanas'ev, V. V.
;
Stesmans, Andre
;
Heyns, Marc
Journal
Microelectronic Engineering
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1936
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1936
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations