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Polarity dependence of defect generation in ultrathin SiO2/ZrO2 gate dielectric stacks
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Authors
Houssa, Michel
;
Afanas'ev, V. V.
;
Stesmans, Andre
;
Heyns, Marc
Issue
19
Journal
Applied Physics Letters
Volume
79
Title
Polarity dependence of defect generation in ultrathin SiO2/ZrO2 gate dielectric stacks
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Journal article
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