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Polarity dependence of defect generation in ultrathin SiO2/ZrO2 gate dielectric stacks

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1928 since deposited on 2021-10-14
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Acq. date: 2026-10-04

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1928 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2026-10-04

Citations