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Polarity dependence of defect generation in ultrathin SiO2/ZrO2 gate dielectric stacks
Publication:
Polarity dependence of defect generation in ultrathin SiO2/ZrO2 gate dielectric stacks
Date
2001
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Houssa, Michel
;
Afanas'ev, V. V.
;
Stesmans, Andre
;
Heyns, Marc
Journal
Applied Physics Letters
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1925
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1925
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations