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Stress-induced leakage current in ultrathin SiO2 layers and the hydrogen dispersive transport model
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Authors
Houssa, Michel
;
Stesmans, Andre
;
Carter, Richard
;
Heyns, Marc
Issue
21
Journal
Applied Physics Letters
Volume
78
Title
Stress-induced leakage current in ultrathin SiO2 layers and the hydrogen dispersive transport model
Publication type
Journal article
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