Stress-induced leakage current in ultrathin SiO2 layers and the hydrogen dispersive transport model
dc.contributor.author | Houssa, Michel | |
dc.contributor.author | Stesmans, Andre | |
dc.contributor.author | Carter, Richard | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-10-14T17:03:32Z | |
dc.date.available | 2021-10-14T17:03:32Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5354 | |
dc.source | IIOimport | |
dc.title | Stress-induced leakage current in ultrathin SiO2 layers and the hydrogen dispersive transport model | |
dc.type | Journal article | |
dc.contributor.imecauthor | Houssa, Michel | |
dc.contributor.imecauthor | Stesmans, Andre | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Houssa, Michel::0000-0003-1844-3515 | |
dc.source.peerreview | no | |
dc.source.beginpage | 3289 | |
dc.source.endpage | 3291 | |
dc.source.journal | Applied Physics Letters | |
dc.source.issue | 21 | |
dc.source.volume | 78 | |
imec.availability | Published - imec |
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