Publication:

Studies on XLK film characterization and integration in copper damascene processes

Date

2001

Proceedings Paper

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Author(s)

Iacopi, Francesca

;

Alves Donaton, Ricardo

;

Coenegrachts, Bart

;

Komiya, Takayuki

;

Struyf, Herbert

;

;

Van Aelst, Joke

;

Boullart, Werner

;

De Roest, David

;

;

Baklanov, Mikhaïl

;

;

Van Hove, Marleen

;

Stucchi, Michele

;

;

;

;

Vanhaelemeersch, Serge

;

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