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Studies on XLK film characterization and integration in copper damascene processes
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Authors
Iacopi, Francesca
;
Alves Donaton, Ricardo
;
Coenegrachts, Bart
;
Komiya, Takayuki
;
Struyf, Herbert
;
Lepage, Muriel
;
Van Aelst, Joke
;
Boullart, Werner
;
De Roest, David
;
Vos, Ingrid
;
Baklanov, Mikhaïl
;
Vereecke, Guy
;
Van Hove, Marleen
;
Stucchi, Michele
;
Tokei, Zsolt
;
Meynen, Herman
;
Bremmer, J. N.
;
Vanhaelemeersch, Serge
;
Maex, Karen
Conference
Advanced Metallization Conference 2000
Title
Studies on XLK film characterization and integration in copper damascene processes
Publication type
Proceedings paper
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