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Low Weibull slope of breakdown distributions in high-k layers

dc.contributor.authorKauerauf, Thomas
dc.contributor.authorDegraeve, Robin
dc.contributor.authorCartier, Eduard
dc.contributor.authorSoens, Charlotte
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-14T17:08:31Z
dc.date.available2021-10-14T17:08:31Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5392
dc.sourceIIOimport
dc.titleLow Weibull slope of breakdown distributions in high-k layers
dc.typeOral presentation
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorSoens, Charlotte
dc.contributor.imecauthorGroeseneken, Guido
dc.source.peerreviewno
dc.source.conferenceSISC-Conference; December 2001; Washington, D.C.
dc.source.conferencelocation
imec.availabilityPublished - imec


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