Optimized thermal processing for Ti-Capped CoSi2 for 0.13 μm technology

Metadata

Show full item record

Authors

Lindsay, Richard; Lauwers, A.; de Potter de ten Broeck, Muriel; Roelandts, Nico; Vrancken, Christa; Maex, Karen

Issue

1_4

Journal

Microelectronic Engineering

Volume

55

Title

Optimized thermal processing for Ti-Capped CoSi2 for 0.13 μm technology

Publication type

Journal article

Collections

Articles