Authors

Nakabayashi, M.; Ohyama, Hidenori; Simoen, Eddy; Ikegami, M.; Claeys, C.; Kobayashi, K.; Yoneoka, M.; Miyahara, K.

Conference

ESREF - Proceedings of the 12th European Symposium Reliability of Electron Devices, Failure Physics and Analysis;

Title

Reliability of polycrystalline silicon thin film resistors

Publication type

Proceedings paper