Authors

Ohyama, Hidenori; Hayama, Kiyoteru; Miura, T.; Simoen, Eddy; Claeys, Cor; Poyai, Amporn; Nakabayashi, M.; Kobayashi, K.

Conference

Symposium B of the E-MRS Spring Meeting 2001: Defect Engineering of Advanced Semiconductor Devices; June 5-8, 2001; Strasbourg,

Title

Defect assessment of irradiated STI diodes

Publication type

Oral presentation