Si(100) epitaxy by low-temperature UHV-CVD: AFM study of the initial stages of growth

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Authors

Chollet, Frederic; André, E.; Vandervorst, Wilfried; Caymax, Matty

Issue

1_4

Journal

Journal of Crystal Growth

Volume

157

Title

Si(100) epitaxy by low-temperature UHV-CVD: AFM study of the initial stages of growth

Publication type

Journal article

Embargo date

9999-12-31

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