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Radiation damages of polycrystalline silicon films and NPN Si transistors by high-energy particle irradiation
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Authors
Ohyama, Hidenori
;
Nakabayashi, M.
;
Simoen, Eddy
;
Claeys, Cor
;
Tanaka, T.
;
Hirao, T.
;
Onada, S.
;
Kobayashi, K.
Issue
9_10
Journal
Microelectronics Reliability
Volume
41
Title
Radiation damages of polycrystalline silicon films and NPN Si transistors by high-energy particle irradiation
Publication type
Journal article
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