Authors

Ohyama, Hidenori; Tanaka, K.; Simoen, Eddy; Claeys, C.; Nakabayashi, M.; Kobayashi, K.

Conference

Symposium B of the E-MRS Spring Meeting 2001: Defect Engineering of Advanced Semiconductor Devices; June 5-8, 2001; Strasbourg,

Title

Radiation damage of polycrystalline silicon films

Publication type

Oral presentation