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Pull-in voltage analysis of fixed-fixed beams

dc.contributor.authorPamidighantam, Sayanu
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-14T17:33:33Z
dc.date.available2021-10-14T17:33:33Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5561
dc.sourceIIOimport
dc.titlePull-in voltage analysis of fixed-fixed beams
dc.typeProceedings paper
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage269
dc.source.endpage272
dc.source.conferenceProceedings 12th Micromechanics Europe Workshop - MME
dc.source.conferencedate16/09/2001
dc.source.conferencelocationCork Ireland
imec.availabilityPublished - imec


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