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A manufacturable 25nm planar MOSFET technology

dc.contributor.authorPonomarev, Youri
dc.contributor.authorLoo, Josine
dc.contributor.authorDachs, Charles
dc.contributor.authorCubaynes, Florence
dc.contributor.authorVerheijen, M. A.
dc.contributor.authorKaiser, M.
dc.contributor.authorvan Berkum, J. G. M.
dc.contributor.authorKubicek, Stefan
dc.contributor.authorBolk, J.
dc.contributor.authorRovers, Madelon
dc.date.accessioned2021-10-14T17:37:03Z
dc.date.available2021-10-14T17:37:03Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5582
dc.sourceIIOimport
dc.titleA manufacturable 25nm planar MOSFET technology
dc.typeProceedings paper
dc.contributor.imecauthorKubicek, Stefan
dc.source.peerreviewno
dc.source.beginpage33
dc.source.endpage34
dc.source.conferenceSymposium on VLSI Technology Digest of Technical Papers;
dc.source.conferencelocation
imec.availabilityPublished - imec


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