Diode analysis of high-energy boron implantation-induced P-well defects

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Authors

Poyai, Amporn; Simoen, Eddy; Claeys, Cor; Rooyackers, Rita; Badenes, Gonçal

Issue

9

Journal

Journal of the Electrochemical Society

Volume

148

Title

Diode analysis of high-energy boron implantation-induced P-well defects

Publication type

Journal article

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