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Electrochemical deposition of copper alloys

dc.contributor.authorQuoc, Toan Le
dc.contributor.authorVervoort, Iwan
dc.contributor.authorConard, Thierry
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T17:39:14Z
dc.date.available2021-10-14T17:39:14Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5595
dc.sourceIIOimport
dc.titleElectrochemical deposition of copper alloys
dc.typeOral presentation
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference; 9-11 October 2001; Montreal, Canada.
dc.source.conferencelocation
imec.availabilityPublished - imec


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