Measurement and simulation of boron diffusivity in strained Si1-XGex epitaxial layers
dc.contributor.author | Krishnasamy, Rajendran | |
dc.contributor.author | Schoenmaker, Wim | |
dc.date.accessioned | 2021-10-14T17:39:33Z | |
dc.date.available | 2021-10-14T17:39:33Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5597 | |
dc.source | IIOimport | |
dc.title | Measurement and simulation of boron diffusivity in strained Si1-XGex epitaxial layers | |
dc.type | Journal article | |
dc.source.peerreview | no | |
dc.source.beginpage | 317 | |
dc.source.endpage | 321 | |
dc.source.journal | VLSI Design | |
dc.source.issue | 1_4 | |
dc.source.volume | 13 | |
imec.availability | Published - imec | |
imec.internalnotes | 7th Int. Workshop on Computational Electronis (ICWE-7). May 2000; Glasgow |
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