Publication:
Measurement and simulation of boron diffusivity in strained Si1-XGex epitaxial layers
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1933 since deposited on 2021-10-14
1last month
Acq. date: 2026-10-10
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Statistics
Views
1933 since deposited on 2021-10-14
1last month
Acq. date: 2026-10-10
Citations