Publication:

Measurement and simulation of boron diffusivity in strained Si1-XGex epitaxial layers

Date

2001

Journal article

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Files

Published version 1.7 MB

Author(s)

Krishnasamy, Rajendran

;

Schoenmaker, Wim

Journal

VLSI Design

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1932 since deposited on 2021-10-14

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Acq. date: 2026-01-08