A simple model and simulation of complete suppression of boron out-diffusion in Si1-xGex by carbon insertion
dc.contributor.author | Krishnasamy, Rajendran | |
dc.contributor.author | Schoenmaker, Wim | |
dc.date.accessioned | 2021-10-14T17:40:01Z | |
dc.date.available | 2021-10-14T17:40:01Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5600 | |
dc.source | IIOimport | |
dc.title | A simple model and simulation of complete suppression of boron out-diffusion in Si1-xGex by carbon insertion | |
dc.type | Proceedings paper | |
dc.source.peerreview | no | |
dc.source.beginpage | 66 | |
dc.source.endpage | 69 | |
dc.source.conference | Proceedings of the International Conference on Simulation of Semiconductor Physics and Processes - SISPAD; 5-7 September 2001; A | |
dc.source.conferencelocation | ||
imec.availability | Published - imec |
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