Show simple item record

A simple model and simulation of complete suppression of boron out-diffusion in Si1-xGex by carbon insertion

dc.contributor.authorKrishnasamy, Rajendran
dc.contributor.authorSchoenmaker, Wim
dc.date.accessioned2021-10-14T17:40:01Z
dc.date.available2021-10-14T17:40:01Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5600
dc.sourceIIOimport
dc.titleA simple model and simulation of complete suppression of boron out-diffusion in Si1-xGex by carbon insertion
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage66
dc.source.endpage69
dc.source.conferenceProceedings of the International Conference on Simulation of Semiconductor Physics and Processes - SISPAD; 5-7 September 2001; A
dc.source.conferencelocation
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record