From Piranha to Barracuda: mechanism of ozone and water vapor photoresistant strip in a wet bench

dc.contributor.author	Riedel, T.
dc.contributor.author	Wolke, K.
dc.contributor.author	De Gendt, Stefan
dc.contributor.author	Onsia, Bart
dc.date.accessioned	2021-10-14T17:42:07Z
dc.date.available	2021-10-14T17:42:07Z
dc.date.issued	2001
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/5612
dc.source	IIOimport
dc.title	From Piranha to Barracuda: mechanism of ozone and water vapor photoresistant strip in a wet bench
dc.type	Proceedings paper
dc.contributor.imecauthor	De Gendt, Stefan
dc.contributor.imecauthor	Onsia, Bart
dc.contributor.orcidimec	De Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.beginpage	227
dc.source.endpage	230
dc.source.conference	Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS
dc.source.conferencedate	18/09/2000
dc.source.conferencelocation	Oostende Belgium
imec.availability	Published - open access
imec.internalnotes	Solid State Phenomena. Part B; Vol. 76-77