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Planarization of deep trenches

dc.contributor.authorRusu, Cristina
dc.contributor.authorKlaasse, Gerard
dc.contributor.authorSedky, Sherif
dc.contributor.authorEsch, Heleen
dc.contributor.authorParmentier, Brigitte
dc.contributor.authorVerbist, Agnes
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-14T17:44:56Z
dc.date.available2021-10-14T17:44:56Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5628
dc.sourceIIOimport
dc.titlePlanarization of deep trenches
dc.typeProceedings paper
dc.contributor.imecauthorParmentier, Brigitte
dc.source.peerreviewno
dc.source.beginpage49
dc.source.endpage57
dc.source.conferenceMicromachining and Microfabrication Process Technology VII
dc.source.conferencedate22/10/2001
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 4557


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